A Study on Design and Implementation of Control Module for Wet Station Monitoring


The Transactions of the Korea Information Processing Society (1994 ~ 2000), Vol. 5, No. 7, pp. 1813-1828, Jul. 1998
10.3745/KIPSTE.1998.5.7.1813,   PDF Download:

Abstract

In this paper, wet station monitoring system is implemented by designing functional tasks and using shared memory for inter process communication. We design recipe command in order to process semiconductor wafer units they ar called a lot, and discuss a monitoring method of batch process of lots by the recipe. We implement the task, the recipe and the shared memory according to the designed format and apply them to the real equipment. As a result of the experiment, each task proceeds the batch processing with the shared memory according to the recipe command and we can visually monitor all of the process by the graphic window.


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Cite this article
[IEEE Style]
H. KwangRok and H. M. Zar, "A Study on Design and Implementation of Control Module for Wet Station Monitoring," The Transactions of the Korea Information Processing Society (1994 ~ 2000), vol. 5, no. 7, pp. 1813-1828, 1998. DOI: 10.3745/KIPSTE.1998.5.7.1813.

[ACM Style]
Han KwangRok and Hwang Mi Zar. 1998. A Study on Design and Implementation of Control Module for Wet Station Monitoring. The Transactions of the Korea Information Processing Society (1994 ~ 2000), 5, 7, (1998), 1813-1828. DOI: 10.3745/KIPSTE.1998.5.7.1813.