Design and Analysis of the Basic Components for the Semiconductor Wafer Cleaning Equipment Monitoring System


The Transactions of the Korea Information Processing Society (1994 ~ 2000), Vol. 7, No. 1, pp. 115-125, Jan. 2000
10.3745/KIPSTE.2000.7.1.115,   PDF Download:

Abstract

In this paper, we suggest the basic components of monitoring system for the semiconductor wafer cleaning equipment and a monitoring system model based on these components. Basic component is defined as a mandatory function which consists of communication with the control system, user interface, communication with the remote monitoring system, management of monitoring data and inter-task communication. We have defined the function of each component and the relation among them, and designed each component as a task. To evaluate the validity of the suggested model, we have implemented the basic components using the Visual C on Windows NT and applied them to the Monitoring System for the semiconductor wafer cleaning equipment.


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Cite this article
[IEEE Style]
H. S. Kang and S. R. Rim, "Design and Analysis of the Basic Components for the Semiconductor Wafer Cleaning Equipment Monitoring System," The Transactions of the Korea Information Processing Society (1994 ~ 2000), vol. 7, no. 1, pp. 115-125, 2000. DOI: 10.3745/KIPSTE.2000.7.1.115.

[ACM Style]
Ho Seok Kang and Seong Rak Rim. 2000. Design and Analysis of the Basic Components for the Semiconductor Wafer Cleaning Equipment Monitoring System. The Transactions of the Korea Information Processing Society (1994 ~ 2000), 7, 1, (2000), 115-125. DOI: 10.3745/KIPSTE.2000.7.1.115.